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Microwave Plasma

Cavity Type Microwave Plasma Source APLC-024

The Cavity Type Microwave Plasma Source APLC-024 is capable of generating plasma in the atmosphere at the frequency 2.45GHz. The use of microwave enables its downsizing. The maximum input power is 1kW, and the quartz tube ID is 20mm for the standard configuration but 10mm ID is selectable as well.

Pen Type Microwave Plasma Source MiMi-P

The Pen Type Microwave Plasma Source MiMi-P is capable of generating plasma in the atmosphere at the frequency 2.45GHz. Its quartz tube ID is 2mm, therefore it is suitable for local processing. It is also suitable for simple experimental operation by using the coaxial power cable which enables easy handling.

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