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Probe Station
Probe Station
Probe Station
AET, Inc.
The Probe station developed by AET, Inc. has a probing stage and a micro positioner that can be adjusted on the X-Y-Z-theta directions, and can probe samples of various shapes and sizes. A custom designed probing fixture allows the use of air coplanar, semi-rigid, or differential active probes. A TRL/LRM calibration kit are designed and manufactured. The probe station can be used for various measurements and calibrations on a semiconductor wafer up to a RF circuit.
Accessory
Vibration Isolation Table/Desk
Vibration Isolation Desk
The vibration isolation table/desk are designed to reduce vibration of the probe station to a minimum.
They can improve the measurement accuracy and the reproductivity of the probe station.
(2P/697KB)