Japanese

High Temperature Substrate Heater

Heaters manufactured by HeatWave Labs, Inc. are metal and ceramic-based heaters, and UHV and O2 compatible. There are also large area panel heaters and SiC coated graphite heaters.

The following specifications can be selected for all types of high temperature heaters.

  • Up to 1200°C operation in UHV or reactive atmospheres
  • Non Gassy
  • Small Button to large area wafer heaters
  • Temperature controllers
For more details, please see HeatWave Labs, Inc. http://www.cathode.com

All contents on this website are the copyright of AET, Inc. or the respective owners. Information on the web-site, including but not limited to text and images, may not, except for strictly private purposes, be reproduced, transferred, distributed or stored without the prior written permission of AET, Inc.
2-7-6 Kurigi, Asaoku, Kawasaki-city, Kanagawa, Japan +81-44-980-0505

General inquiry info@aetjapan.com http://www.aetjapan.com