Probe Station System
The Probe Station developed by AET, Inc. has a probing stage and a micro positioner that can be adjusted on the X-Y-Z-theta directions, and can probe samples of various shapes and sizes.
System Configuration
The components of the Probe Station System can be customized according to the user's specifications. Special discounted prices can be available if an Agilent network analyzer and Probe Station are purchased as a system.
Specifications
Model: AGPS501-002
| Frequency | According to probe specifications. |
|---|
[Probing Stage]
| Measurement Table |
Movement (Rough Adjustment)
X: Fixed Y: 125mm (Sliding type) Z: Up and down type
Movement (Fine Adjustment)
Z: ±6.5mm (10μm Scale interval) θ : ±5°
Measurement Table Size: Max 255mm × 100mm
Measurement Sample Size: Up to 190mm × 100mm |
[Micropositioner]
| Positioner |
(Fine adjustment) Movement direction
X: ±6.5mm Y: ±6.5mm Z: ±6.5mm (10μm scale intervals) θ : ±3 degrees |
| Positioner Table |
Movement direction
X: 105mm Y: 52.5mm (2.5mm per ratchet step) Z: fixed |
[Probe]
| Probe Type |
Air coplanar, semi-rigid or differential active probe |
[Stereomicroscope]
| Olympus |
Magnification: 0.67 - 4.5X
Zoom Ratio: 6.7
Operation Range: 110mm
Lens: WHSZ10 x-H |
[Probe Station]
| Size and Weight |
600mm(W) × 400mm(D) × 550mm(H), 27kg |
[Vacuum Pen And Vacuum Pump]
| Vacuum Pen | Pad Diameter: Φ6mm
Suction Strength: 94g (max) |
| Vacuum Pump | Vacuum: -33.3kPa { -250mmHg }
Discharge Rate: 5 l⁄min
Standard Voltage: AC100V (50⁄60Hz)
Power Consumption: 15⁄14W
Current: 0.35⁄0.3A
Rated Time: Continuous |
Options
Network Analyzer (Agilent Technologies)
All network analyzers manufactured by Agilent Technologies can be used for the probe station system.
>>To network analyzer details page
AET, Inc. is a Solution Partner of Agilent Technologies, Inc.
RF lZlPROBE Probe ( Cascade Microtech, Inc. )
lZlPROBE is a registered trademark of Cascade Microtech.
AET, Inc. is a business partner of Cascade Microtech, Inc.
Active Differential Probe and Probe Amplifier (Agilent Technologies, Inc.)
Installation of Active Differential Probe in the Micropositioner
|
High precision measurement at high frequencies has been limited because general oscilloscope probes are usually handheld. By assembling the 13GHz Active Differential Probe (Agilent) to the Micropositioner, a handsfree active differential probe measurement system was created. Circuit boards equipped with DSPs and CPUs can be easily measured with high stability.
|
1169A InfiniiMax II Series Probe Amplifier
| Bandwidth | Range | Input Impedance |
- 12GHz Wideband
- 13 GHz (typical value) Wide Band
|
- Dynamic range: 3.3V p-p
- DC offset range: ±16V
- Maximum voltage: ±30V
|
- Differential input resistance :50kΩ
- Differential input capacitance: 0.21pF
- Single-ended input resistance: 25kΩ
- Single-ended input capacitance: 0.35pF
|
AET, Inc. is a Solution Partner of Agilent Technologies, Inc.
Skip to top
