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Plasma Sources

For Atmospheric Pressure

Compact Atmospheric Pressure Microwave Plasma Source, developed by AET, features a hybrid mode type resonator. Microwave power is easily fed through a coaxial cable and a connector. A waveguide or a matching section is not required. A target can easily be irradiated from any angle and position. Plasma generated in the atmosphere is a non-equilibrium plasma with a low gas temperature that does not cause thermal reactions. Therefore, this system is suitable for continuous processing in the atmosphere e.g. irradiating plasma to targets on a conveyor belt. It is also suitable for surface processing, coating, sterilization and cleaning of various materials. It can be applied to medical and chemical processes and coming nano-and biotechnologies as well.

Plasma emitted from atmospheric pressure nitrogen gas
Plasma emitted from atmospheric pressure nitrogen gas
Plasma emission inside the resonator
Plasma emission inside a resonator

Compact Atmospheric Pressure Microwave Plasma Source

(Resonator Type 2.45 GHz)

Cavity Type Microwave Plasma Source APLC-024 (Water-cooling Type)

Specifications
ModelAPLC024-015
Operating Frequency2.45GHz
Plasma Spout Diameterø20mm
CoolingWater-cooling
Input Power1kW max.
FlangeWR430
GasArgon gas and others

Pen Type Microwave Plasma Source MiMi-P (Air-cooling Type)

Specifications
Operating Frequency2.45GHz
Sizeø22 × 55mm
Plasma Spout Diameterø2mm
CoolingAir-cooling
Input Power80~100W
ConnectorN type
GasArgon gas and others

Pen Type Microwave Plasma Source MiMi-P (Water-cooling Type)

Specifications
Operating Frequency2.45GHz
Plasma Spout Diameterø2mm
CoolingWater-cooling
Input Power80~300W
Connector7⁄16
GasArgon gas and others

SAIREM

Microwave Downstream Plasma Source - 2.45GHz

Downstream source, 2.45 GHz WR340
Laboratory plasma setup using 6 kW, 2.45 GHz microwave generator and downstream plasma source

This surface wave type of plasma source generates plasma in a dielectric material tube (diameter 20-60 mm) placed in a standard WR340 waveguide. This plasma source enables the ignition and sustaining of long plasma columns depending on the pressure, the microwave power and the nature of the ‘plasma’ gas.

※SAIREM S.A., http://www.sairem.com

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