Micro Miniature X-ray Source

The Micro Miniature X-ray Source, an innovative technology developed by AET, can accelerate electron beams in a high-gradient electric field by a micro miniature X-ray tube, and extract X-rays from a target. It is also possible to extract only electron beams through a vacuum thin film. The Micro Miniature X-ray Source consists of a flexible coaxial cable and the micro miniature X-ray tube with a carbon nanotube cathode, which has been developed using high-voltage and ultra-short pulse technology.

Applications include usage in medical treatment, research and industry such as radiation therapy and non-destructive inspection.


  • Radiation theraphy
  • Tunica vasculosa irradiation
  • Diagnostic X-ray source
  • Substitution for isotope source
  • Non-destructive inspection
  • Surface treatment and surface analysis
  • Sterilization
  • Production process for semiconductor
  • Medical science
  • Biology
  • Physics
  • Chemistry
  • Engineering
  • Pharmacy


Beam VoltageContinuously variable (80kV max)
Peak Beam Current500mA max
Pulse Width20nsec
X-ray Tube Diameter<5mm

* Patent No. 3090910
* The electron beam accelerator and the transmission cable are consumables.