Metamaterials: Physics and Engineering Explorations

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Correlation Spectroscopy of Surfaces, Thin Films, and Nanostructures

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RF MEMS and Their Applications

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RF MEMS: Theory, Design, and Technology

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MEMS Mechanical Sensors

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An Introduction to Microelectromechanical Systems Engineering, Second Edition

著者：Nadim Maluf and Kirt Williams

RF MEMS Circuit Design for Wireless Communications

著者：Hector J.De Los Santos