Probe Station System

The Probe Station developed by AET, Inc. has a probing stage and a micro positioner that can be adjusted on the X-Y-Z-theta directions, and can probe samples of various shapes and sizes.
System Configuration
The components of the Probe Station System can be customized according to the user's specifications. Special discounted prices can be available if an Agilent network analyzer and Probe Station are purchased as a system.
Standard Configuration |
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Probe Station |
Vacuum Pen and Vacuum Pump |
Options |
Network Analyzer ( Agilent Technologies,Inc ) |
RF lZl Probe ( Cascade Microtech,Inc ) |
Active Differential Probe and Probe Amplifier ( Agilent Technologies,Inc ) |
4-terminal DC Measurement Needle ( Tungsten needle ) |
Vibration Isolation Table/Desk |
Specifications
Model: AGPS501-002
Frequency | Depending on specifications of probes. |
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[Probing Stage]
Measurement Table | Movement (Coarse Adjustment) X: Fixed Y: 125mm (Sliding type) Z: Up and down type Movement (Fine Adjustment) Z: ±6.5mm (10μm Scale interval) θ : ±5° Measurement Table Size: Max 255mm × 100mm Measurement Sample Size: Up to 190mm × 100mm |
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[Micropositioner]
Positioner | (Fine adjustment) Movement direction X: ±6.5mm Y: ±6.5mm Z: ±6.5mm (10μm scale intervals) θ : ±3 degrees |
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Positioner Table | Movement direction X: 105mm Y: 52.5mm (2.5mm per ratchet step) Z: fixed |
[Probe]
Probe Type | Air coplanar, semi-rigid or differential active probe |
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[Stereo Microscope]
Olympus Model SZ61 or equivalents | Magnification: 0.67 - 4.5X Zoom Ratio: 6.7 Operation Range: 110mm Lens: WHSZ10 x-H |
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[Main Unit]
Size and Weight | 600mm(W) × 400mm(D) × 550mm(H), 27kg |
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[Vacuum Pen and Vacuum Pump]
Vacuum Pen | Pad Diameter: Φ6mm Suction Strength: 94g (max) |
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Vacuum Pump | Ultimate Vacuum: -33.3kPa { -250mmHg } Discharge Rate: 5 l⁄min Rated Voltage: AC100V (50⁄60Hz) Power Consumption: 15⁄14W Current: 0.35⁄0.3A Rated Time: Continuous |

Vacuum Pump

Vacuum Pen
Options
Network Analyzer (Keysight Technologies)
All network analyzers manufactured by Keysight Technologies can be used for the probe station system.



RF lZlProbe ( Cascade Microtech, Inc. )

lZlProbe is a registered trademark of Cascade Microtech.
AET, Inc. is a business partner of Cascade Microtech, Inc.
Active Differential Probe and Probe Amplifier (Keysight Technologies, Inc.)

Installation of Active Differential Probe in the Micropositioner
High precision measurement at high frequencies has been limited because general oscilloscope probes are usually handheld. By assembling the 13GHz Active Differential Probe (Keysight) to the Micropositioner, a handsfree active differential probe measurement system was created. Circuit boards equipped with DSPs and CPUs can be easily measured with high stability.
Bandwidth | Range | Input Impedance |
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Vibration Isolation Table/Desk
The Vibration Isolation Table/Desk are designed to reduce vibration of the Probe Station to a minimum. They can improve the measurement accuracy and the reproducibility of the Probe Station.
Please see the product catalog for further details.

