High Temperature Substrate Heater

Heaters manufactured by HeatWave Labs, Inc. are metal and ceramic-based heaters, and UHV and O2 compatible. There are also large area panel heaters and SiC coated graphite heaters.

The following specifications can be selected for all types of high temperature heaters.

  • Up to 1200℃ operation in UHV or reactive atmospheres
  • Non Gassy
  • Small Button to large area wafer heaters
  • Temperature controllers

※For more details, please see HeatWave Labs, Inc. http://www.cathode.com